Projection optical system, exposure apparatus, and exposure method

ABSTRACT

An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid (immersion liquid). The projection optical system, which projects a reduced image of a first plane onto a second plane through the liquid, includes a refractive optical element (Lp) arranged nearest to the second plane. The refractive optical element includes a light emitting surface (Lpb) shaped to be substantially symmetric with respect to two axial directions (XY-axes) perpendicular to each other on the second plane. The light emitting surface has a central axis (Lpba) that substantially coincides with a central axis ( 40   a ) of a circle ( 40 ) corresponding to a circumference of a light entering surface (Lpa) of the refractive optical element. The central axis of the light emitting surface is decentered in one of the two axial directions (Y-axis) from an optical axis (AX).

TECHNICAL FIELD

The present invention relates to a projection optical system, anexposure apparatus, and an exposure method, and more particularly, to aprojection optical system optimal for an exposure apparatus used tomanufacture microdevices, such as semiconductor devices and liquidcrystal display devices, through a photolithography process.

BACKGROUND ART

An exposure apparatus projects and exposes an image of a pattern of amask (or a reticle) on a photosensitive substrate (e.g., wafer or aglass plate coated by a photoresist). More specifically, the exposureapparatus uses a projection optical system to project and expose theimage in a photolithography process, in which semiconductor devices orthe like are manufactured. The projection optical system is required tohave a higher resolution due to the increasing level of integration ofsemiconductor devices or the like manufactured with the exposureapparatus.

To improve the resolution of the projection optical system, theprojection optical system needs to shorten the wavelength λ of itsillumination light (exposure light) and increase the numerical apertureNA at its image side. The resolution of the projection optical system iswritten as k*λ/NA (where k is a process coefficient). The image-sidenumerical aperture NA is written as n*sin θ, where n is the refractiveindex of a medium (usually gas, such as air) that arranged between theprojection optical system and the photosensitive substrate, and θ is themaximum incident angle at which light enters the photosensitivesubstrate.

When the maximum angle θ is set larger in an effort to increase theimage-side numerical aperture, the angle at which light is emitted fromthe projection optical system and the angle at which the light entersthe photosensitive substrate increase. This increases reflection lossoccurring at an optical surface. As a result, the projection opticalsystem cannot obtain a large effective numerical aperture at its imageside. One conventional technique for increasing the image-side numericalaperture is an immersion technique (refer to, for example, PatentDocument 1), with which an optical path formed between a projectionoptical system and a photosensitive substrate is filled with a mediumsuch as a liquid having a high refractive index.

Patent Document 1: International Patent Publication No. WO2004/019128

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention

As described above, the conventional technique of filling an image spacewith a liquid medium having a higher refractive index than a gas mediumenables the projection optical system to have an image-side numericalaperture that is greater than 1 and improves the resolution of theprojection optical system, which is used in an exposure apparatus.However, microlithography, through which micropatterns are formed,always needs to consider chip costs. To reduce chip costs, thepredominant immersion lithography system is a local immersionlithography system, which uses a mechanism for supplying and dischargingliquid to and from only a limited portion of an image space of aprojection optical system. To prevent enlargement of a substrate stage(wafer stage) of the projection optical system and improve the accuracyof an alignment optical system, the local immersion system is requiredto minimize the portion of the image space in the projection opticalsystem that is filled with the liquid (immersion liquid).

An immersion projection optical system may have, for example, animage-side numerical aperture that is greater than 1.2. An immersionprojection optical system with such an image-side numerical aperturepreferably employs a catadioptric projection optical system structure tosatisfy Petzval's condition and ensure the flatness of an image. Aimmersion projection optical system with such an image-side numericalaperture also preferably employs an off-axis optical system structure,in which an effective field of view region and an effective projectionregion do not extend on an optical axis of the projection optical system(the regions are “off” the optical axis), to increase the variety ofpatterns of images that can be formed. When a catadioptric and off-axisimmersion projection optical system is employed, images can be producedwith a greater maximum height than a conventional refractive projectionoptical system. However, if a refractive optical element arrangednearest to an imaging position in the projection optical system isformed to have a light emitting surface that is rotationally symmetricwith respect to the optical axis in accordance with the conventionaltechnique, a large portion of an image space of the projection opticalsystem will be filled with the liquid. As a result, the substrate stagemay be enlarged or the accuracy of the alignment optical system may belowered.

The present invention has been made to solve the above problems. It isan object of the present invention to provide an immersion projectionoptical system with, for example, a catadioptric and off-axis structurethat reduces the portion of an image space filled with liquid (immersionliquid). It is another object of the present invention to provide anexposure apparatus and an exposure method that use a high-resolutionimmersion projection optical system, which reduces the portion of animage space filled with liquid, and enable a micropattern to beprojected and exposed with a high accuracy without enlarging a substratestage of the projection optical system or lowering the accuracy of analignment optical system of the projection optical system.

Means of Solving the Problems

To achieve the above object, a first aspect of the present inventionprovides a projection optical system for projecting an image of a firstplane onto a second plane through a liquid. The projection opticalsystem includes a refractive optical element arranged nearest to thesecond plane. The refractive optical element includes a light emittingsurface shaped to be rotationally asymmetric with respect to an opticalaxis of the projection optical system in accordance with the shape of aneffective projection region formed on the second plane. The phrase“shaped to be rotationally asymmetric” refers to a state having “a shapeother than an infinitely symmetric rotation”.

A second aspect of the present invention provides a projection opticalsystem for projecting an image of a first plane onto a second planethrough a liquid. The projection optical system includes a refractiveoptical element arranged nearest to the second plane. The refractiveoptical element includes a light emitting surface shaped to be two-foldrotationally symmetric with respect to an optical axis of the projectionoptical system.

A third aspect of the present invention provides a projection opticalsystem for projecting an image of a first plane onto a second planethrough a liquid. The projection optical system includes a refractiveoptical element arranged nearest to the second plane. The refractiveoptical element includes a light emitting surface shaped to besubstantially symmetric with respect to two axial directionsperpendicular to each other on the second plane, and the light emittingsurface has a central axis that substantially coincides with an opticalaxis and a central axis of a circle corresponding to a circumference ofa light entering surface of the refractive optical element.

A fourth aspect of the present invention provides a projection opticalsystem for projecting an image of a first plane onto a second planethrough a liquid. The projection optical system includes a refractiveoptical element arranged nearest to the second plane. The refractiveoptical element includes a light emitting surface shaped to be one-foldrotationally symmetric with respect to an optical axis of the projectionoptical system.

A fifth aspect of the present invention provides a projection opticalsystem for projecting an image of a first plane onto a second planethrough a liquid. The projection optical system includes a refractiveoptical element arranged nearest to the second plane. The refractiveoptical element includes a light emitting surface shaped to besubstantially symmetric with respect to two axial directionsperpendicular to each other on the second plane. The light emittingsurface has a central axis that substantially coincides with a centralaxis of a circle corresponding to a circumference of a light enteringsurface of the refractive optical element, and the central axis of thelight emitting surface is decentered in one of the two axial directionsfrom the optical axis.

A sixth aspect of the present invention provides a projection opticalsystem for projecting an image of a first plane onto a second planethrough a liquid. The projection optical system includes a refractiveoptical element arranged nearest to the second plane. The refractiveoptical element includes a light emitting surface shaped to besubstantially symmetric with respect to one of two axial directionsperpendicular to each other and asymmetric with respect to the other oneof the axial directions on the second plane, a central axis of a circlecorresponding to a circumference of a light entering surface of therefractive optical element substantially coincides with the opticalaxis, and the light emitting surface has a central axis decentered inone of the two axial directions from the optical axis.

A seventh aspect of the present invention provides a projection opticalsystem for projecting an image of a first plane onto a second planethrough a liquid. The projection optical system includes a refractiveoptical element arranged nearest to the second plane. The refractiveoptical element includes a light emitting surface shaped to besubstantially symmetric with respect to two axial directionsperpendicular to each other on the second plane, a central axis of acircle corresponding to a circumference of a light entering surface ofthe refractive optical element substantially coincides with the opticalaxis, and the light emitting surface has a central axis decentered inone of the axial directions from the optical axis.

An eighth aspect of the present invention provides a projection opticalsystem for projecting an image of a first plane onto a second planethrough a liquid. The projection optical system includes a refractiveoptical element arranged nearest to the second plane. When two axialdirections perpendicular to each other are set on the second plane, alight emitting surface of the refractive optical element has a length inone of the axial directions and a length in the other one of the axialdirections that differ from each other.

A ninth aspect of the present invention provides an exposure apparatusincluding the projection optical system according to any one of thefirst to eighth aspects for projecting an image of a predeterminedpattern onto a photosensitive substrate that is set on the second planebased on illumination light from the pattern set on the first plane.

A tenth aspect of the present invention provides an exposure methodincluding a setting step of setting a predetermined pattern on the firstplane, and an exposure step of projecting and exposing an image of thepattern onto a photosensitive substrate that is set on the second planewith the projection optical system according to any one of claims 1 to35 based on illumination light from the predetermined pattern.

An eleventh aspect of the present invention provides a devicemanufacturing method including an exposure step of projecting andexposing an image of a pattern set on the first plane onto aphotosensitive substrate set on the second plane with the projectionoptical system according to any one of the first to eighth aspects, anda development step of developing the photosensitive substrate that hasundergone the exposure step.

A twelfth aspect of the present invention provides a refractive opticalelement for use in an immersion objective optical system that forms animage of a first plane onto an effective projection region on a secondplane. One optical surface comes in contact with a liquid. The oneoptical surface of the refractive optical element is shaped to berotationally asymmetric with respect to an optical axis of the immersionobjective optical system in accordance with a shape of the effectiveprojection region on the second plane.

A thirteenth aspect of the present invention provides a refractiveoptical element for use in an immersion objective optical system thatforms an image of a first plane on a second plane. One optical surfacecomes in contact with a liquid. When two axial directions perpendicularto each other are set on the second plane, the one optical surface ofthe refractive optical element has a length in one of the axialdirections and a length in the other one of the axial directions thatdiffer from each other.

EFFECT OF THE INVENTION

The immersion projection optical system according to a typical aspect ofthe present invention has, for example, a catadioptric and off-axisstructure, in which a light emitting surface of a refractive opticalelement that is arranged nearest to an imaging position isrotationally-asymmetric with respect to an optical axis of theprojection optical system according to the shape of an effectiveprojection region formed on an image surface. More specifically, thelight emitting surface of the refractive optical element issubstantially symmetric with respect to two axial directions that areperpendicular to each other on the image surface. A central axis of thelight emitting surface and a central axis of a circle corresponding to acircumference of a light entering surface of the refractive opticalelement substantially coincide with each other. The central axis of thelight emitting surface is decentered along one of the two axialdirections with respect to the optical axis.

As a result, the light emitting surface of the refractive opticalelement that is arranged nearest to the imaging position in theprojection optical system of the present invention isrotationally-asymmetric in accordance with the shape of the effectiveprojection region. The projection optical system of the presentinvention reduces the portion of an image space filled with liquid(immersion liquid). Further, the exposure apparatus and the exposuremethod of the present invention use a high-resolution immersionprojection optical system, which reduces a portion of an image spacefilled with liquid, and enable a micropattern to be projected andexposed with a high accuracy without enlarging a substrate stage of theprojection optical system or lowering the accuracy of an alignmentoptical system of the projection optical system. Consequently, thisproduces a satisfactory microdevice with high accuracy.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram showing the structure of an exposureapparatus according to a present embodiment of the present invention;

FIG. 2 shows the positional relationship between a rectangularstationary exposure region formed on a wafer and a reference opticalaxis in the present embodiment of the present invention;

FIG. 3 is a schematic diagram showing the structure of an interface lensand a wafer in examples of the present invention;

FIG. 4 shows a lens structure of a projection optical system in a firstexample of the present invention;

FIG. 5 shows lateral aberration occurring in the projection opticalsystem in the first example of the present invention;

FIG. 6 shows a lens structure of a projection optical system in a secondexample of the present invention;

FIG. 7 shows lateral aberration occurring in the projection opticalsystem in the second example of the present invention;

FIG. 8 is a diagram illustrating problems occurring when a lightemitting surface of a refractive optical element arranged nearest to animaging position is formed rotationally symmetric in the prior art;

FIG. 9 is a schematic diagram showing the structure of an immersed planeparallel plate in each example of the present invention;

FIG. 10 is a schematic diagram showing the structure of an immersedplane parallel plate according to a first modification of the presentembodiment;

FIG. 11 is a schematic diagram showing the structure of an immersedplane parallel plate according to a second modification of the presentembodiment;

FIG. 12 is a schematic diagram showing the structure of an immersedplane parallel plate according to a third modification of the presentembodiment;

FIG. 13 is a flowchart showing a method for forming a microdevice, whichserves as a semiconductor device; and

FIG. 14 is a flowchart showing a method for forming a microdevice, whichserves as a liquid crystal display device.

DESCRIPTION OF REFERENCE NUMERALS R reticle RST reticle stage PLprojection optical system Lp interface lens Lp immersed plane parallelplate Lm1, Lm2 pure water (liquid) W wafer  1 illumination opticalsystem  9 Z-stage 10 XY-stage 12 movable mirror 13 wafer laserinterferometer 14 main control system 15 wafer stage drive system 21first supply and discharge mechanism 22 second supply and dischargemechanism

BEST MODE FOR CARRYING OUT THE INVENTION

An embodiment of the present invention will now be described withreference to the drawings. FIG. 1 is a schematic diagram showing thestructure of an exposure apparatus of the present embodiment of thepresent invention. In FIG. 1, X-axis and Y-axis are directions parallelto a wafer W, whereas Z-axis is a direction perpendicular to the waferW. More specifically, the XY surface is parallel to the horizontalsurface, and +Z-axis is oriented upward in the vertical direction.

The exposure apparatus of the present embodiment includes an ArF excimerlaser light source, which functions for example as an exposure lightsource, and an illumination optical system 1 as shown in FIG. 1. Theillumination optical system 1 includes an optical integrator(homogenizer), a field stop, and a condenser lens. Exposure light (anexposure beam) IL, which is ultraviolet pulsed light having a wavelengthof 193 nm, is emitted from the light source, passes through theillumination optical system 1, and illuminates a reticle (mask) R. Thereticle R has a pattern that is to be transferred. The entire patternregion on the reticle R includes a rectangular (slit) pattern region ofwhich long sides extend in X-axis direction and of which short sidesextend in the Y-axis direction. The exposure beam IL illuminates therectangular pattern region on the reticle R.

Light that has passed through the reticle R enters an immersionprojection optical system PL. The projection optical system PL projectsthe reticle pattern with a predetermined reduction ratio onto the wafer(photosensitive substrate) W that is coated with a photoresist. Theprojection optical system PL forms an image of the reticle pattern onthe wafer W. More specifically, the projection optical system PL formsthe pattern image on a rectangular stationary exposure region (effectiveexposure region) of which long sides extend in the X-axis direction andof which short sides extend in the Y-axis direction on the wafer W,which optically corresponds to the rectangular illumination regionformed on the reticle R.

FIG. 2 shows the positional relationship between the rectangularstationary exposure region (effective exposure region) that is formed onthe wafer and a reference optical axis in the present embodiment. In thepresent embodiment, as shown in FIG. 2, the rectangular effectiveexposure region ER having a predetermined size is defined at a positiondistant from the reference optical axis AX in the Y-axis direction by anoff-axis amount A within a circular region (image circle) IF. The centerof the image circle IF coincides with the reference optical axis AX. Theimage circle IF has a radius B.

The effective exposure region ER has a length LX in the X-axis directionand a length LY in the Y-axis direction. Although not shown in thedrawing, the rectangular illumination region (effective illuminationregion) corresponding to the rectangular effective exposure region ER isformed on the reticle R. More specifically, a rectangular illuminationregion having a size and shape corresponding to the effective exposureregion ER is formed on the reticle R at a position distant from thereference optical axis AX in the Y-axis direction by the off-axis amountA.

A reticle stage RST supports the reticle R in such a manner that thereticle R is parallel to the XY surface. The reticle stage RSTincorporates a mechanism for slightly moving the reticle R in the X-axisdirection, the Y-axis direction, and a rotation direction. The positionsof the reticle stage RST in the X-axis direction, the Y-axis direction,and the rotation direction are measured and controlled in real time by areticle laser interferometer (not shown). A wafer holder (not shown)fixes the wafer W to a Z-stage 9 in a manner that the wafer W isparallel to the XY surface.

The Z-stage 9 is fixed to an XY-stage 10. The XY-stage 10 moves alongthe XY surface, which is substantially parallel to an image surface ofthe projection optical system PL. The Z-stage 9 controls the focusposition (Z-axis position) and the tilt angle of the wafer W. Thepositions of the Z-stage 9 in the X-axis direction, the Y-axisdirection, and the rotation direction are measured and controlled inreal time by a wafer laser interferometer 13. The wafer laserinterferometer 13 uses a movable mirror 12, which is arranged on theZ-stage 9.

The XY-stage 10 is mounted on a base 11. The XY-stage 10 controls thepositions of the wafer W in the X-axis direction, the Y-axis direction,and the rotation direction. A main control system 14, which is mountedon the exposure apparatus of the present embodiment, adjusts thepositions of the reticle R in the X-axis direction, the Y-axisdirection, and the rotation direction based on the values measured bythe reticle laser interferometer. More specifically, the main controlsystem 14 transmits a control signal to mechanisms incorporated in thereticle stage RST, and positions the reticle R by slightly moving thereticle stage RST.

The main control system 14 adjusts the focus position (Z-axis position)and the tilt angle of the wafer W to align the surface of the wafer W tothe image surface of the projection optical system PL throughautofocusing and automatic leveling. More specifically, the main controlsystem 14 transmits a control signal to a wafer stage drive system 15and drives the Z-stage 9 using the wafer stage drive system 15 to adjustthe focus position and the tilt angle of the wafer W.

The main control system 14 further adjusts the positions of the wafer Win the X-axis direction, the Y-axis direction, and the rotationdirection based on the values measured by the wafer laser interferometer13. More specifically, the main control system 14 transmits a controlsignal to the wafer stage drive system 15, and adjusts the positions ofthe wafer W in the X-axis direction, the Y-axis direction, and therotation direction by driving the XY stage 10 using the wafer stagedrive system 15.

During exposure, the main control system 14 transmits a control signalto mechanisms incorporated in the reticle stage RST and also transmits acontrol signal to the wafer stage drive system 15. This drives thereticle stage RST and the XY-stage 10 at a speed ratio determined by theprojection magnitude of the projection optical system PL, while thepattern image of the reticle R is projected and exposed within apredetermined shot region formed on the wafer W. Afterwards, the maincontrol system 14 transmits a control signal to the wafer stage drivesystem 15, and drives the XY-stage 10 using the wafer stage drive system15 to cause a step movement of the exposure position to another shotregion formed on the wafer W.

The pattern image of the reticle R is repeatedly scanned and exposed onthe wafer W with the step-and-scan method as described above. Morespecifically, the reticle stage RST and the XY-stage 10 and consequentlythe reticle R and the wafer W are moved (scanned) in synchronization inthe short-side direction of the rectangular stationary exposure regionand the stationary illumination region, or the Y-axis direction, whilethe positions of the reticle R and the wafer W are adjusted using thewafer stage drive system 15 and the wafer laser interferometer 13 or thelike. Through this operation, the reticle pattern is scanned and exposedin the region on the wafer W that has the same length as the length ofthe long side LX of the stationary exposure region and has the samewidth as the width corresponding to the scanning amount (moving amount)of the wafer W.

FIG. 3 is a schematic diagram showing the structure of an interface lensand a wafer in examples of the present embodiment. As shown in FIG. 3,an immersed plane parallel plate Lp is arranged nearest to the wafer Win the projection optical system PL in each example of the presentembodiment. One surface of the immersed plane parallel plate Lp nearerto the reticle R (object side surface) is in contact with a secondliquid Lm2, and another surface of the immersed plane parallel plate Lpnearer to the wafer W (image side surface) is in contact with a firstliquid Lm1. An interface lens Lb is arranged adjacent to the immersedplane parallel plate Lp. One surface of the interface lens Lb nearer tothe retile R (reticle side surface) is in contact with gas, and anothersurface of the interface lens Lb nearer to the wafer W (wafer sidesurface) is in contact with the second liquid Lm2.

The projection optical system PL of each example of the presentinvention uses, for example, pure water (deionized water) as the firstliquid Lm1 and the second liquid Lm2, which have a reflective indexgreater than 1.1. Pure water is easily obtained in large amounts at, forexample, a semiconductor manufacturing factory. The projection opticalsystem PL of each example uses, as the interface lens Lb, a positivelens that has a convex surface at the reticle side and a planar surfaceas the wafer side. The interface lens Lb and the immersed plane parallelplate Lp are both made of silica. Silica is selected as the material forthe interface lens Lb and the immersed plane parallel plate Lp becausethe projection optical system PL may fail to maintain stable imagingperformance when, for example, the interface lens Lb and/or the immersedplane parallel plate Lp are made of fluorite, which is soluble in water.

Further, the internal refractive index distribution of fluorite is knownto contain a high-frequency element. The uneven refractive indexes offluorite including the high-frequency element may cause flares. This mayeasily lower the imaging performance of the projection optical system.Moreover, fluorite is known to have natural birefringence. The naturalbirefringence effect of fluorite needs to be corrected to achieve highimaging performance of the projection optical system. The solubility,high-frequency element in the refractive index distribution, and naturalbirefringence make fluorite unsuitable for the material for theinterface lens Lb and the immersed plane parallel plate Lp. It ispreferable that the interface lens Lb and the immersed plane parallelplate Lp be made of silica.

The exposure apparatus that performs scanning and exposure while movingthe wafer W relative to the projection optical system PL with thestep-and-scan method needs to continuously fill the optical path betweenthe interface lens Lb and the wafer W of the projection optical systemPL with the liquid (Lm1 and Lm2) from the start to the end of thescanning and exposure process. To enable this, the exposure apparatusmay use a technique described for example in International PatentPublication No. WO99/49504 or a technique described for example inJapanese Laid-Open Patent Publication No. 10-303114.

According to the technique described in International Patent PublicationNo. WO99/49504, a liquid supply apparatus supplies liquid, which hasbeen adjusted to a predetermined temperature, to fill the optical pathbetween the interface lens Lb and the wafer W through a supply pipe andan ejection nozzle, and then recovers the liquid on the wafer W througha recovery pipe and a suction nozzle. According to the techniquedescribed in Japanese Laid-Open Patent Publication No. 10-303114, awafer holder table functions as a container for accommodating liquid.The wafer W is positioned and supported at the center of an inner bottomsurface of the wafer holder table (immersed in the liquid) by vacuumcontact. A distal end of a barrel of the projection optical system PL isimmersed in the liquid. A wafer-side optical surface of the interfacelens Lb is immersed in the liquid.

As shown in FIG. 1, the projection optical system PL of the presentembodiment uses a first supply and discharge mechanism 21 to circulatepure water, which functions as the first liquid Lm1, in the optical pathbetween the immersed plane parallel plate Lp and the wafer W. Theprojection optical system PL also uses a second supply and dischargemechanism 22 to circulate pure water, which functions as the secondliquid Lm2, in the optical path between the interface lens Lb and theimmersed plane parallel plate Lp. In this manner, the projection opticalsystem PL circulates a small amount of pure water as the immersionliquid to prevent corrosion or fungal deterioration of the liquid.

In the examples of the present invention, an aspherical surface can bewritten as expression (a) shown below. In expression (a), y representsthe height in the direction vertical to the optical axis, z representsthe distance (sag amount) between a contact planar surface at the vertexof the aspherical surface and the position at the height y on theaspherical surface, r represents the curvature radius of the vertex, krepresents the coefficient of the cone, and C_(n) represents the n-thdegree aspherical coefficient. In tables 1 and 2, which are shown below,the surface number of each aspherical lens surface is marked with *.

z=(y ² /r)/[1+{1−(1+k)*y ² /r ²}^(1/2) ]+C ₄ *y ⁴ +C ₆ *y ⁶ +C ₈ *y ⁸ +C₁₀ *y ¹⁰ +C ₁₂ *y ¹² +C ₁₄ *y ¹⁴+  Expression (a)

The projection optical system PL of each example of the presentembodiment includes a first imaging optical system G1, a second imagingoptical system G2, and a third imaging optical system G3. The firstimaging optical system G1 forms a first intermediate image of a patternof the reticle R, which is arranged on an object plane (first plane) ofthe projection optical system PL. The second imaging optical system G2forms a second intermediate image (which is an image of the firstintermediate image as well as a secondary image of the reticle pattern)of the reticle pattern based on the light from the first intermediateimage. The third imaging optical system G3 forms a final image (which isa reduced image of the reticle pattern) on the wafer W, which isarranged on an image plane (second plane) of the projection opticalsystem PL, based on light from the second intermediate image. The firstimaging optical system G1 and the third imaging optical system G3 areboth refractive optical systems. The second imaging optical system G2 isa catadioptric optical system that includes a concave reflective mirrorCM.

A first planar reflective mirror (first folding mirror) M1 is arrangedin an optical path formed between the first imaging optical system G1and the second imaging optical system G2. A second planar reflectivemirror (second folding mirror) M2 is arranged in an optical path formedbetween the second imaging optical system G2 and the third imagingoptical system G3. In the projection optical system PL of each exampleof the present invention, light from the reticle R passes through thefirst imaging optical system G1 and forms a first intermediate image ofthe reticle pattern in the vicinity of the first planar reflectivemirror M1. Light from the first intermediate image then passes throughthe second imaging optical system G2 and forms a second intermediateimage of the reticle pattern in the vicinity of the second planarreflective mirror M2. Finally, light from the second intermediate imagepasses through the third imaging optical system G3, and forms a finalimage of the reticle pattern on the wafer W.

In the projection optical system PL of each example of the presentinvention, the first imaging optical system G1 has an optical axis AX1and the third imaging optical system G3 has an optical axis AX3. Theoptical axes AX1 and AX3 extend linearly in the vertical direction. Theoptical axes AX1 and AX3 coincide with the reference optical axis AX.The second imaging optical system G2 has an optical axis AX2 thatextends linearly along the horizontal direction (vertical to thereference optical axis AX). The reticle R, the wafer W, all the opticalmembers forming the first imaging optical system G1, and all the opticalmembers forming the third imaging optical system G3 are arrangedparallel to one another along planes perpendicular to the direction ofgravitational force, that is, along horizontal planes. Further, thefirst planar reflective mirror M1 and the second planar reflectivemirror M2 have reflective surfaces that each form an angle of 45 degreeswith the reticle surface. The first planar reflective mirror M1 and thesecond planar reflective mirror M2 are formed integrally as a singleoptical member. Further, the projection optical system PL of eachexample of the present invention is formed to be substantiallytelecentric at both of the object side and the image side.

FIRST EXAMPLE

FIG. 4 shows a lens structure of a projection optical system accordingto a first example of the present embodiment. As shown in FIG. 4, thefirst imaging optical system G1 included in the projection opticalsystem PL of the first example includes a plane parallel plate P1, abiconvex lens L11, a positive meniscus lens L12 having a convex surfaceat its reticle side, a biconvex lens L13, a biconcave lens L14 having anaspherical concave surface at its reticle side, a positive meniscus lensL15 having a convex surface at its reticle side, a positive meniscuslens L16 having a concave surface at its reticle side, a negativemeniscus lens L17 having a concave surface at its reticle side, apositive meniscus lens L18 having an aspherical concave surface at itsreticle side, a positive meniscus lens L19 having a concave surface atits reticle side, a biconvex lens L110, and a positive meniscus lensL111 having an aspherical concave surface at its wafer side, which arearranged sequentially in this order from the reticle side.

The second imaging optical system G2 includes a negative meniscus lensL21 having a concave surface at its reticle side, a negative meniscuslens L22 having a concave surface at its reticle side, and a concavereflective mirror CM having a concave surface at its reticle side, whichare arranged sequentially in this order along the traveling path of theincoming light from the reticle side (light entering side) of theprojection optical system PL. The third imaging optical system G3includes a positive meniscus lens L31 having a concave surface at itsreticle side, a biconvex lens L32, a positive meniscus lens L33 having aconvex surface at its reticle side, a positive meniscus lens L34 havinga spherical concave surface at its wafer side, a biconcave lens L35, abiconcave lens L36 having an aspherical concave surface at its waferside, a positive meniscus lens L37 having an aspherical concave surfaceat its reticle side, a positive meniscus lens L38 having an asphericalconcave surface at its wafer side, a negative meniscus lens L39 havingan aspherical concave surface at its wafer side, a positive meniscuslens L310 having an aspherical concave surface at its reticle side, abiconvex lens L311, an aperture stop AS, a plano-convex lens L312 havinga planar surface at its wafer side, a positive meniscus lens L313 havingan aspherical concave surface at its wafer side, a positive meniscuslens S314 having an aspherical concave surface at its wafer side, aplano-convex lens L315 (interface lens Lb) having a planar surface atits wafer side, and a plane parallel plate Lp, which are arrangedsequentially in this order from the reticle side (light entering side).

In the projection optical system PL of the first example, an opticalpath between the interface lens Lb and the plane parallel plate(immersed plane parallel plate) Lp and an optical path between the planeparallel plate Lp and the wafer W are filled with pure water (Lm1 andLm2) having a refractive index of 1.435876 for an ArF excimer laser beam(having a central wavelength λ of 193.306 nm), which is the used light(exposure beam). All the light transmitting members including theinterface lens Lb and the plane parallel plate Lp are made of silica(SiO₂), which has a refractive index of 1.5603261 relative to thecentral wavelength of the used light.

Table 1 below shows the specifications of the projection optical systemPL in the first example. In Table 1, λ represents the central wavelengthof the exposure beam, β represents the projection magnification (imagingratio of the entire system), NA represents the numerical aperture at theimage side (wafer side) of the system, B represents the radius of theimage circle IF on the wafer W, A represents the off-axis amount of theeffective exposure region ER, LX represents the size of the effectiveexposure region ER in the X-axis direction (the long-side dimension ofthe effective exposure region ER), and LY represents the dimension ofthe effective exposure region ER in the Y-axis direction (the short-sidedimension of the effective exposure region ER).

In the table, the surface number represents the order of each surface onthe path of the light traveling from the reticle surface, which is theobject surface (first plane), to the wafer surface, which is the imagesurface (second plane), r represents the curvature radius of eachsurface (the curvature radius (mm) of the vertex in the case of anaspherical surface), d represents the axial interval of each surface orthe surface interval (mm), and n represents the refractive index aboutthe central wavelength of the exposure beam. The sign of the surfaceinterval d is inverted whenever the light is reflected. Accordingly, thesurface interval d has a negative sign for the optical path from thereflective surface of the first planar reflective mirror M1 to theconcave reflective mirror CM and for the optical path from the secondplanar reflective mirror M2 to the image surface, whereas the surfaceinterval d has a positive sign for other optical paths.

In the first imaging optical system G1, the curvature radius is positivefor convex surfaces facing toward the reticle side, and the curvatureradius is negative for concave surfaces facing toward the reticle side.In the second imaging optical system G2, the curvature radius ispositive for concave surfaces facing toward the light entering side(reticle side) of the incoming light, and the curvature radius isnegative for convex surfaces facing toward the light entering side. Thenotations used in Table 1 are used in Table 2, which will be describedlater.

TABLE 1 (Main Specifications) λ = 193.306 nm β = ¼ NA = 1.32 B = 15.3 mmA = 2.8 mm LX = 26 mm LY = 5 mm (Specifications of Optical Members)Surface Optical No. r d n Member (Reticle Surface) 113.7542  1 ∞ 8.00001.5603261 (P1)  2 ∞ 6.0000  3 961.49971 52.0000 1.5603261 (L11)  4−260.97642 1.0000  5 165.65618 35.7731 1.5603261 (L12)  6 329.4128515.7479  7 144.73700 56.4880 1.5603261 (L13)  8 −651.17229 4.1450  9*−678.61021 18.2979 1.5603261 (L14) 10 173.73534 1.0000 11 82.8514128.4319 1.5603261 (L15) 12 122.17403 24.6508 13 −632.23083 15.81351.5603261 (L16) 14 −283.76586 22.9854 15 −95.83749 44.8780 1.5603261(L17) 16 −480.25701 49.9532 17* −327.24655 37.6724 1.5603261 (L18) 18−152.74838 1.0000 19 −645.51205 47.0083 1.5603261 (L19) 20 −172.708901.0000 21 1482.42136 32.7478 1.5603261 (L110) 22 −361.68453 1.0000 23185.06735 36.2895 1.5603261 (L111) 24* 1499.92500 72.0000 25 ∞ −204.3065(M1) 26 115.50235 −15.0000 1.5603261 (L21) 27 181.35110 −28.1819 28107.57500 −18.0000 1.5603261 (L22) 29 327.79447 −34.9832 30 165.1870034.9832 (CM) 31 327.79446 18.0000 1.5603261 (L22) 32 107.57500 28.181933 181.35110 15.0000 1.5603261 (L21) 34 115.50235 204.3065 35 ∞ −72.0000(M2) 36 552.89298 −24.4934 1.5603261 (L31) 37 211.40931 −1.0000 38−964.15750 −27.5799 1.5603261 (L32) 39 451.41200 −1.0000 40 −239.74429−35.7714 1.5603261 (L33) 41 −171769.23040 −1.0000 42 −206.94777 −50.00001.5603261 (L34) 43* −698.47035 −43.1987 44 560.33453 −10.0000 1.5603261(L35) 45 −116.92245 −46.5360 46 209.32811 −10.0000 1.5603261 (L36) 47*−189.99848 −23.6644 48* 1878.63986 −31.5066 1.5603261 (L37) 49 211.85278−1.0000 50 −322.20466 −33.1856 1.5603261 (L38) 51* −1160.22740 −10.017252 −2715.10365 −22.0000 1.5603261 (L39) 53* −959.87714 −42.0799 54*727.37853 −62.0255 1.5603261 (L310) 55 240.59248 −1.0000 56 −16276.86134−62.1328 1.5603261 (L311) 57 333.64919 −1.0000 58 ∞ −1.0000 (AS) 59−303.09919 −68.2244 1.5603261 (L312) 60 ∞ −1.0000 61 −182.25869 −77.61221.5603261 (L313) 62* −472.72383 −1.0000 63 −131.14200 −49.9999 1.5603261(L314) 64* −414.78286 −1.0000 65 −75.90800 −43.3351 1.5603261 (L315: Lb)66 ∞ −1.0000 1.435876 (Lm2) 67 ∞ −13.0000 1.5603261 (Lp) 68 ∞ −2.99991.435876 (Lm1) (Wafer Surface) (Aspherical Surface Data) 9th surface K =0 C₄ = −7.9031 * 10⁻⁸ C₆ = 8.6709 * 10⁻¹² C₈ = −6.5472 * 10⁻¹⁶ C₁₀ =1.5504 * 10⁻²⁰ C₁₂ = 2.6800 * 10⁻²⁴ C₁₄ = −2.6032 * 10⁻²⁸ C₁₆ = 7.3308 *10⁻³³ C₁₈ = 0 17th surface K = 0 C₄ = 4.7672 * 10⁻⁹ C₆ = −8.7145 * 10⁻¹³C₈ = −2.8591 * 10⁻¹⁷ C₁₀ = 3.9981 * 10⁻²¹ C₁₂ = −1.9927 * 10⁻²⁵ C₁₄ =2.8410 * 10⁻³⁰ C₁₆ = 6.5538 * 10⁻³⁵ C₁₈ = 0 24th surface K = 0 C₄ =2.7118 * 10⁻⁸ C₆ = −4.0362 * 10⁻¹³ C₈ = 8.5346 * 10⁻¹⁸ C₁₀ = −1.7653 *10⁻²² C₁₂ = −1.1856 * 10⁻²⁷ C₁₄ = 5.2597 * 10⁻³¹ C₁₆ = −2.0897 * 10⁻³⁵C₁₈ = 0 43th surface K = 0 C₄ = −1.8839 * 10⁻⁸ C₆ = 5.6009 * 10⁻¹³ C₈ =−1.8306 * 10⁻¹⁷ C₁₀ = 2.2177 * 10⁻²¹ C₁₂ = −2.3512 * 10⁻²⁵ C₁₄ =1.7766 * 10⁻²⁹ C₁₆ = −6.5390 * 10⁻³⁴ C₁₈ = 0 47th surface K = 0 C₄ =9.0773 * 10⁻⁸ C₆ = −5.4651 * 10⁻¹² C₈ = 4.4000 * 10⁻¹⁶ C₁₀ = −2.7426 *10⁻²⁰ C₁₂ = 3.2149 * 10⁻²⁵ C₁₄ = 2.3641 * 10⁻²⁸ C₁₆ = −1.3953 * 10⁻³²C₁₈ = 0 48th surface K = 0 C₄ = 3.0443 * 10⁻⁸ C₆ = −1.6528 * 10⁻¹² C₈ =2.3949 * 10⁻¹⁷ C₁₀ = −4.4953 * 10⁻²¹ C₁₂ = 3.0165 * 10⁻²⁵ C₁₄ =−1.2463 * 10⁻²⁸ C₁₆ = 1.0783 * 10⁻³² C₁₈ = 0 51th surface K = 0 C₄ =1.8357 * 10⁻⁸ C₆ = −4.3103 * 10⁻¹³ C₈ = −9.4499 * 10⁻¹⁷ C₁₀ = 4.3247 *10⁻²¹ C₁₂ = −1.6979 * 10⁻²⁵ C₁₄ = 8.6892 * 10⁻³⁰ C₁₆ = −1.5935 * 10⁻³⁴C₁₈ = 0 53th surface K = 0 C₄ = −3.9000 * 10⁻⁸ C₆ = −7.2737 * 10⁻¹³ C₈ =1.1921 * 10⁻¹⁶ C₁₀ = −2.6393 * 10⁻²¹ C₁₂ = −3.1544 * 10⁻²⁶ C₁₄ =1.8774 * 10⁻³⁰ C₁₆ = −2.3545 * 10⁻³⁵ C₁₈ = 0 54th surface K = 0 C₄ =1.9116 * 10⁻⁸ C₆ = −6.7783 * 10⁻¹³ C₈ = 1.5688 * 10⁻¹⁷ C₁₀ = −6.0850 *10⁻²² C₁₂ = 1.8575 * 10⁻²⁶ C₁₄ = −4.2147 * 10⁻³¹ C₁₆ = 7.3240 * 10⁻³⁶C₁₈ = 0 62th surface K = 0 C₄ = 3.0649 * 10⁻⁸ C₆ = −2.3613 * 10⁻¹² C₈ =1.5604 * 10⁻¹⁶ C₁₀ = −7.3591 * 10⁻²¹ C₁₂ = 2.1593 * 10⁻²⁵ C₁₄ =−3.5918 * 10⁻³⁰ C₁₆ = 2.5879 * 10⁻³⁵ C₁₈ = 0 64th surface K = 0 C₄ =−6.0849 * 10⁻⁸ C₆ = −8.7021 * 10⁻¹³ C₈ = −1.5623 * 10⁻¹⁶ C₁₀ = 1.5681 *10⁻²⁰ C₁₂ = −1.6989 * 10⁻²⁴ C₁₄ = 7.9711 * 10⁻²⁹ C₁₆ = −2.7075 * 10⁻³³C₁₈ = 0

FIG. 5 shows lateral aberrations in the projection optical system PL ofthe first example. In the aberration charts, Y represents the imageheight, the solid line represents lateral aberration occurring when theexposure beam has a central wavelength of 193.3060 nm, the broken linerepresents lateral aberration occurring when the exposure beam has acentral wavelength of 193.306 nm+0.2 pm=193.3062 nm, the single-dashline represents lateral aberration occurring when the exposure beam hasa central wavelength of 193.306 nm −0.2 pm=193.3058 nm. The notationsused in FIG. 5 are used in FIG. 7, which will be described later. Asapparent from FIG. 5, the aberration is corrected in a satisfactorymanner for the exposure beams with a wavelength width of 193.306 nm±0.2pm although the projection optical system PL has an extremely largeimage-side numerical aperture (NA=1.32) and a relatively large effectiveexposure region ER (26 mm by 5 mm).

SECOND EXAMPLE

FIG. 6 shows a lens structure for a projection optical system accordingto a second example of the present embodiment. As shown in FIG. 6, thefirst imaging optical system G1 in the projection optical system PL ofthe second example includes a plane parallel plate P1, a biconvex lensL11, a positive meniscus lens L12 having a convex surface at its reticleside, a positive meniscus lens L13 having a convex surface at itsreticle side, a biconcave lens L14 having an aspherical concave surfaceat its reticle side, a positive meniscus lens L15 having a convexsurface at its reticle side, a positive meniscus lens L16 having aconcave surface at its reticle side, a negative meniscus lens L17 havinga concave surface at its reticle side, a positive meniscus lens L18having an aspherical concave surface at its reticle side, a positivemeniscus lens L19 having a concave surface at its reticle side, abiconcave lens L110, and a positive meniscus lens L111 having anaspherical concave surface at its wafer side, which are arrangedsequentially in this order from the reticle side.

The second imaging optical system G2 includes a negative meniscus lensL21 having a concave surface at its reticle side, a negative meniscuslens L22 having a concave surface at its reticle side, and a concavereflective mirror CM having a concave surface at its reticle side, whichare arranged sequentially in this order along a traveling path of theincoming light from the reticle side (light entering side) of theprojection optical system PL. A third imaging optical system G3 includesa positive meniscus lens L31 having a concave surface at its reticleside, a biconvex lens L32, a positive meniscus lens L33 having a convexsurface at its reticle side, a positive meniscus lens L34 having anaspherical concave surface at its wafer side, a biconcave lens L35, abiconcave lens L36 having a aspherical concave surface at its waferside, a positive meniscus lens L37 having an aspherical concave surfaceat its reticle side, a positive meniscus lens L38 having an asphericalconcave surface at its wafer side, a plano-concave lens L39 having anaspherical concave surface at its wafer side, a positive meniscus lensL310 having an aspherical concave surface at its reticle side, apositive meniscus lens L311 having a concave surface at its reticleside, an aperture stop AS, a plano-convex lens L312 having a planarsurface at its wafer side, a positive meniscus lens L313 having anaspherical concave surface at its wafer side, a positive meniscus lensS314 having an aspherical concave surface at its wafer side, aplano-convex lens L315 (interface lens Lb) having a planar surface atits wafer side, and a plane parallel plate Lp, which are arrangedsequentially in this order from the reticle side (light entering side).

In the same manner as in the first example, in the second example, anoptical path between the interface lens Lb and the plane parallel plate(immersed plane parallel plate) Lp and an optical path between the planeparallel plate Lp and the wafer W are filled with pure water (Lm1 andLm2) having a refractive index of 1.435876 relative to an ArF excimerlaser beam (having a central wavelength λ of 193.306 nm), which is theused laser beam (exposure beam). All the light transmitting membersincluding the interface lens Lb and the plane parallel plate Lp are madeof silica (SiO₂), which has a refractive index of 1.5603261 relative tothe central wavelength of the used light. Table 2 below shows thespecifications of the projection optical system PL according to thesecond example.

TABLE 2 (Main Specifications) λ = 193.306 nm β = ¼ NA = 1.3 B = 15.4 mmA = 3 mm LX = 26 mm LY = 5 mm (Specifications of Optical Members)Surface Optical No. r d n Member (Reticle Surface) 128.0298  1 ∞ 8.00001.5603261 (P1)  2 ∞ 3.0000  3 708.58305 50.0000 1.5603261 (L11)  4−240.96139 1.0000  5 159.28256 55.0000 1.5603261 (L12)  6 1030.4258315.3309  7 175.91680 33.4262 1.5603261 (L13)  8 1901.42936 13.4484  9*−313.76486 11.8818 1.5603261 (L14) 10 235.56199 1.0000 11 90.4080153.3442 1.5603261 (L15) 12 109.36394 12.8872 13 −1337.13410 20.23851.5603261 (L16) 14 −314.47144 10.2263 15 −106.13528 42.5002 1.5603261(L17) 16 −334.97792 56.0608 17* −1619.43320 46.3634 1.5603261 (L18) 18−167.00000 1.0000 19 −568.04127 48.4966 1.5603261 (L19) 20 −172.673661.0000 21 637.03167 27.8478 1.5603261 (L110) 22 −838.93167 1.0000 23264.56403 30.7549 1.5603261 (L111) 24* 3443.52617 72.0000 25 ∞ −237.1956(M1) 26 134.07939 −15.0000 1.5603261 (L21) 27 218.66017 −33.2263 28111.51192 −18.0000 1.5603261 (L22) 29 334.92606 −28.5215 30 170.9206728.5215 (CM) 31 334.92606 18.0000 1.5603261 (L22) 32 111.51192 33.226333 218.66017 15.0000 1.5603261 (L21) 34 134.07939 237.1956 35 ∞ −72.0000(M2) 36 1133.17643 −25.2553 1.5603261 (L31) 37 247.47802 −1.0000 38−480.60890 −29.6988 1.5603261 (L32) 39 626.43077 −1.0000 40 −208.29831−36.2604 1.5603261 (L33) 41 −2556.24930 −1.0000 42 −173.46230 −50.00001.5603261 (L34) 43* −294.18687 −26.4318 44 699.54032 −11.5000 1.5603261(L35) 45 −106.38847 −47.9520 46 158.19938 −11.5000 1.5603261 (L36) 47*−189.99848 −27.6024 48* 487.32943 −34.3282 1.5603261 (L37) 49 153.21216−1.0000 50 −280.33475 −39.4036 1.5603261 (L38) 51* −1666.66667 −17.386252 ∞ −22.0000 1.5603261 (L39) 53* −1511.71580 −40.3150 54* 655.86673−62.2198 1.5603261 (L310) 55 242.88510 −1.0000 56 843.73059 −49.25381.5603261 (L311) 57 280.00000 −1.0000 58 ∞ −1.0000 (AS) 59 −291.92686−61.1038 1.5603261 (L312) 60 ∞ −1.0000 61 −179.32463 −67.4474 1.5603261(L313) 62* −438.34656 −1.0000 63 −128.42402 −52.4156 1.5603261 (L314)64* −401.88080 −1.0000 65 −75.86112 −41.5893 1.5603261 (L315: Lb) 66 ∞−1.0000 1.435876 (Lm2) 67 ∞ −16.5000 1.5603261 (Lp) 68 ∞ −3.00001.435876 (Lm1) (Wafer Surface) (Aspherical Surface Data) 9th surface K =0 C₄ = −3.1753 * 10⁻⁸ C₆ = 9.0461 * 10⁻¹² C₈ = −1.0355 * 10⁻¹⁵ C₁₀ =1.2398 * 10⁻¹⁹ C₁₂ = −1.1221 * 10⁻²³ C₁₄ = 5.7476 * 10⁻²⁸ C₁₆ =−1.1800 * 10⁻³² C₁₈ = 0 17th surface K = 0 C₄ = −2.8399 * 10⁻⁸ C₆ =−3.0401 * 10⁻¹³ C₈ = 1.1462 * 10⁻¹⁷ C₁₀ = 4.0639 * 10⁻²² C₁₂ = −8.6125 *10⁻²⁶ C₁₄ = 4.4202 * 10⁻³⁰ C₁₆ = −9.9158 * 10⁻³⁵ C₁₈ = 0 24th surface K= 0 C₄ = 2.1499 * 10⁻⁸ C₆ = −3.8861 * 10⁻¹³ C₈ = 5.4812 * 10⁻¹⁸ C₁₀ =−2.1623 * 10⁻²³ C₁₂ = −2.5636 * 10⁻²⁶ C₁₄ = 2.1879 * 10⁻³⁰ C₁₆ =−6.5039 * 10⁻³⁵ C₁₈ = 0 43th surface K = 0 C₄ = −2.0533 * 10⁻⁸ C₆ =7.8051 * 10⁻¹³ C₈ = 9.4002 * 10⁻¹⁸ C₁₀ = −2.1043 * 10⁻²¹ C₁₂ = 7.8182 *10⁻²⁵ C₁₄ = −9.2007 * 10⁻²⁹ C₁₆ = 3.6742 * 10⁻³³ C₁₈ = 0 47th surface K= 0 C₄ = 9.8639 * 10⁻⁸ C₆ = −6.7359 * 10⁻¹² C₈ = 6.8579 * 10⁻¹⁶ C₁₀ =−6.1604 * 10⁻²⁰ C₁₂ = 5.1722 * 10⁻²⁴ C₁₄ = −2.9412 * 10⁻²⁸ C₁₆ =8.6688 * 10⁻³³ C₁₈ = 0 48th surface K = 0 C₄ = 4.3101 * 10⁻⁸ C₆ =−3.2805 * 10⁻¹² C₈ = 5.6432 * 10⁻¹⁷ C₁₀ = −9.2345 * 10⁻²² C₁₂ = 1.0713 *10⁻²⁵ C₁₄ = −9.9944 * 10⁻³⁰ C₁₆ = 1.8148 * 10⁻³³ C₁₈ = 0 51th surface K= 0 C₄ = 2.5839 * 10⁻⁸ C₆ = −1.8848 * 10⁻¹² C₈ = −4.9271 * 10⁻¹⁷ C₁₀ =4.4946 * 10⁻²¹ C₁₂ = −7.2550 * 10⁻²⁶ C₁₄ = 4.9237 * 10⁻³¹ C₁₆ =−2.4260 * 10⁻³⁵ C₁₈ = 6.2565 * 10⁻⁴⁰ 53th surface K = 0 C₄ = −4.7449 *10⁻⁸ C₆ = −2.3075 * 10⁻¹³ C₈ = 1.0475 * 10⁻¹⁶ C₁₀ = −2.1805 * 10⁻²¹ C₁₂= −9.0530 * 10⁻²⁶ C₁₄ = 4.6274 * 10⁻³⁰ C₁₆ = −6.4961 * 10⁻³⁵ C₁₈ =3.4402 * 10⁻⁴¹ 54th surface K = 0 C₄ = 2.0328 * 10⁻⁸ C₆ = −7.7439 *10⁻¹³ C₈ = 1.6217 * 10⁻¹⁷ C₁₀ = −3.5531 * 10⁻²² C₁₂ = 8.2634 * 10⁻²⁷ C₁₄= 2.6232 * 10⁻³¹ C₁₆ = −2.0989 * 10⁻³⁵ C₁₈ = 4.0888 * 10⁻⁴⁰ 62th surfaceK = 0 C₄ = 2.5121 * 10⁻⁸ C₆ = −2.0342 * 10⁻¹² C₈ = 1.2906 * 10⁻¹⁶ C₁₀ =−5.4455 * 10⁻²¹ C₁₂ = 1.2885 * 10⁻²⁵ C₁₄ = −1.4600 * 10⁻³⁰ C₁₆ =3.2850 * 10⁻³⁶ C₁₈ = 0 64th surface k = 0 C₄ = −2.8098 * 10⁻⁸ C₆ =−3.9565 * 10⁻¹² C₈ = 3.1966 * 10⁻¹⁶ C₁₀ = −2.7246 * 10⁻²⁰ C₁₂ = 1.8266 *10⁻²⁴ C₁₄ = −8.6244 * 10⁻²⁹ C₁₆ = 2.1570 * 10⁻³³ C₁₈ = 0

FIG. 7 shows lateral aberrations occurring in the projection opticalsystem PL of the second example. As apparent from FIG. 7, the aberrationis corrected in an satisfactory manner for the exposure beams having awavelength width of 193.306 nm±0.2 pm even though the projection opticalsystem PL of the second example has an extremely large image-sidenumerical aperture (NA=1.3) and a relatively large effective exposureregion ER (26 mm by 5 mm) in the same manner as in the projectionoptical system PL of the first example.

In this manner, the optical path formed between the interface lens Lband the wafer W is filled with pure water (Lm1 and Lm2) having a largerefractive index in the projection optical system PL of the presentembodiment. This enables the projection optical system PL to have arelatively large effective imaging region while achieving a largeeffective image-side numerical aperture. The projection optical systemPL of each example of the present invention has a rectangular effectiveexposure region (stationary exposure region) ER having the dimensions of26 mm by 5 mm while achieving a high image-side numerical aperture ofabout 1.3 for an ArF excimer laser beam having a central wavelength of193.306 nm. This enables the projection optical system PL of eachexample to scan and expose a circuit pattern within a rectangularexposure region of, for example, 26 mm by 33 mm with a high accuracy.

A shape error on any lens surface of the two-way optical elements (L21and L22) in a catadioptric optical system affects local flares twice asmuch as a normal lens surface. Thus, in each of the above examples,aspherical surfaces are excluded from a two-way optical path in whichtwice as much local flares may occur with a single lens surface. Thatis, all of the two-way optical elements do not include optical surfaceswith an aspherical shape. In each of the above examples, local flaresare further reduced by eliminating crystalline material from the two-wayoptical path portions, through which light passes twice, that is, byusing an amorphous material (silica in the present embodiment) to formall the two-way optical elements (L21 and L22) in the second imagingoptical system G2. Further, a shape error occurring on the reflectivesurface of the concave reflection mirror in the second imaging opticalsystem G2 also affects local flares twice as much as a shape erroroccurring on a lens surface on a one-way optical element. Thus, in eachof the above examples, local flares are reduced by forming the concavereflection mirror CM to have a spherical reflective surface.

The immersion projection optical system PL of the present embodimentemploys a catadioptric optical system structure. Thus, the projectionoptical system PL substantially satisfies Petzval's condition andensures the flatness of an image although the projection optical systemPL has a large image-side numerical aperture. The projection opticalsystem PL also employs an off-axis optical system structure, in which aneffective field of view region (effective illumination region) and aneffective projection region (effective exposure region ER) do not extendon an optical axis of the projection optical system (the regions are“off” the optical axis). This projection optical system PL eliminates alight shielding portion in its lens aperture (pupil), and increases thevariety of patterns of images that can be formed. However, thecatadioptric and off-axis immersion projection optical system PL of thepresent embodiment will have problems when the light emitting surface ofthe immersed plane parallel plate Lp, which is a refractive opticalelement arranged nearest to the imaging position (to the wafer W), isformed rotationally symmetric with respect to the optical axis AX3 (orthe reference optical axis AX) according to a conventional technique.

FIG. 8 is a diagram describing problems occurring when the lightemitting surface of the refractive optical element arranged nearest tothe imaging position is formed rotationally symmetric according to aconventional technique. As shown in FIG. 8, the light entering surfaceof the immersed plane parallel plate Lp, which is the refractive opticalelement arranged nearest to the imaging position (to the wafer W) in theimmersion projection optical system PL, has a circumferencecorresponding to a circle 30 of which center coincides with the opticalaxis AX. In other words, the light entering surface of the immersedplane parallel plate Lp has substantially equal lengths in the two axialdirections that are perpendicular to each other. The circumference ofthe light entering surface of the immersed plane parallel plate Lp mayactually include a cutaway portion such as an orientation flat, thecircumference of the light entering surface may actually have apolygonal shape, and the circumference of the light entering surface mayactually have a holding tab that is flush with the light enteringsurface. In any case, the central axis of the circle 30 corresponding tothe outer circumference of the light entering surface of the immersedplane parallel plate Lp coincides with the optical axis AX.

The effective light emitting region 31 is defined on the light emittingsurface of the immersed plane parallel plate Lp as a region throughwhich an effective imaging light beam passes. The effective lightemitting region 31 corresponds to the rectangular effective exposureregion (stationary exposure region) ER that is formed on the wafer W andthat does not include the optical axis AX. The effective light emittingregion 31 is decentered in one direction (Y-axis) with respect to theoptical axis AX and has a rectangular shape with round corners. In theconventional technique, the light emitting surface of the immersed planeparallel plate Lp is rotationally symmetric (infinite-fold rotationallysymmetric) with respect to the optical axis AX irrespective of therotation asymmetry of the effective light emitting region 31. In otherwords, the light emitting surface of the immersion parallel plate Lp hassubstantially equal lengths in the two axial directions that areperpendicular to each other. Thus, the light emitting surface of theimmersed plane parallel plate Lp has a circumference of which centercoincides with the optical axis AX and corresponds to a large circle 32that contains the effective light emitting region 31. As a result, thestructure of the conventional technique enlarges the portion of theimage space in the projection optical system PL that is filled with theliquid Lm1. This consequently enlarges the substrate stage (9 to 11) andlowers the accuracy of the alignment optical system (not shown).

FIG. 9 is a schematic diagram showing the structure of an immersed planeparallel plate in each example of the present embodiment. FIG. 9( a) isa bottom view of the immersed plane parallel plate Lp, and FIGS. 9( b)and 9(c) are side views of the immersed plane parallel plate Lp. Asshown in FIG. 9, a light entering surface Lpa of the immersed planeparallel plate Lp in each example of the present embodiment has acircumference corresponding to a circle 40. The circle 40, whichcorresponds to the circumference of the light entering surface Lpa, hasa center 40 a that is decentered in the Y-axis direction with respect tothe optical axis AX (AX3). A reference circle indicated by a broken line41 is a circle of which center coincides with the optical axis AX andthat is inscribed in the circle 40. In other words, the light enteringsurface Lpa of the immersed plane parallel plate Lp has substantiallyequal lengths in the two axial directions (XY-axes directions) that areperpendicular to each other.

An effective light emitting region 42 formed on the light emittingsurface Lpb of the immersed plane parallel plate Lp is substantiallysymmetric with respect to X-axis and Y-axis directions and has arectangular shape with round corners. The effective light emittingregion 42 has a center 42 a that coincides with the center 40 a of thecircle 40 corresponding to the circumference of the light enteringsurface Lpa. The light emitting surface Lpb of the immersed planeparallel plate Lp is substantially symmetric with respect to the X-axisand Y-axis directions and contains the effective light emitting region42 with a small marginal region formed around the effective lightemitting region 42. The light emitting surface Lpb has a center Lpbathat coincides with the center 42 a of the effective light emittingregion 42 and the center 40 a of the circle 40 corresponding to theouter circumference of the light entering surface Lpa. From anotherpoint of view, the light emitting surface Lpb of the immersed planeparallel plate Lp is one-fold rotationally symmetric with respect to theoptical axis AX. In FIG. 9( a), a hatched portion Lpc surrounding thelight emitting surface Lpb shows a tilted surface that extends from theouter circumference of the light emitting surface Lpb toward the lightentering side.

More specifically, in each example of the present invention, the lightemitting surface Lpb of the immersed plane parallel plate Lp issubstantially symmetric with respect to the two axial directions thatare perpendicular to each other on the wafer W, that is, with respect tothe X-axis and Y-axis directions. Further, the central axis Lpba of thelight emitting surface Lpb and the central axis 40 a of the circle 40corresponding to the outer circumference of the light entering surfaceLpa coincide with each other. The central axis Lpba of the lightemitting surface Lpb is decentered in the Y-axis direction with respectto the optical axis AX. The central axis (barycenter axis) of theeffective exposure region ER formed on the wafer W (the effectiveprojection region of the projection optical system PL) substantiallycoincides with the central axis Lpba of the light emitting surface Lpb.In other words, the length of the light emitting surface Lpb in oneaxial direction (Y-axis) differs from the length of the light emittingsurface Lpb in the other axial direction (X-axis).

As described above, the present embodiment differs from the prior art inthat the portion of the image space in the projection optical system PLfilled with liquid (immersion liquid) Lm1 can be reduced. In theconventional technique, the light emitting surface of the immersed planeparallel plate Lp is formed rotationally symmetric relative to theoptical axis AX irrespective of the effective light emitting region 42being rotationally asymmetric relative to the optical axis AX. In thepresent embodiment, the light emitting surface Lpb of the immersed planeparallel plate Lp is formed to be asymmetric relative to the opticalaxis AX in accordance with the shape of the effective exposure region ER(or the effective projection region of the projection optical system PL)that excludes the optical axis AX (i.e., formed so that the lightemitting surface Lpb has different lengths in two axial directions(XY-axes directions) that are perpendicular to each other) on the waferW. In the exposure apparatus of the preferred embodiment, the projectionoptical system PL of the present embodiment reduces the portion of theimage space of the projection optical system PL filled with the liquid(immersion liquid) Lm1. The exposure apparatus of the present embodimentemploys the high-resolution immersed projection optical system PL thatreduces the portion of the image space in the projection optical systemPL filled with liquid (immersion liquid) Lm1. Thus, a micropattern canbe projected and exposed with high accuracy without enlarging thesubstrate stages (9 to 11) or lowering the accuracy of the alignmentoptical system.

FIG. 10 is a schematic diagram showing the structure of an immersedplane parallel plate according to a first modification of the presentembodiment. FIG. 10( a) is a bottom view of the immersed plane parallelplate Lp, and FIGS. 10( b) and 10(c) are side views of the immersedplane parallel plate Lp. As shown in FIG. 10, a light entering surfaceLpa of the immersed plane parallel plate Lp according to the firstmodification has an outer circumference corresponding to a circle 50 ofwhich center coincides with an optical axis AX (AX3). In other words,the light entering surface Lpa of the immersed plane parallel plate Lphas substantially equal lengths in the two axial directions (XY-axisdirections) that are perpendicular to each other. An effective lightemitting region 51 formed on a light emitting surface Lpb of theimmersed plane parallel plate Lp is substantially symmetric in theX-axis and Y-axis directions and has a rectangular shape with roundcorners. The effective light emitting region 51 has a center 51 adecentered in the Y-axis direction from the optical axis AX.

The light emitting surface Lpb of the immersed plane parallel plate Lpis substantially symmetric with respect to X-axis and Y-axis directionsand contains the effective light emitting region 51 with a smallmarginal region formed at one long side and the two short sides of theeffective light emitting region 51 and a relatively large marginalregion formed at the other long side of the effective light emittingregion 51. In FIG. 10( a), a hatched portion Lpc surrounding the lightemitting surface Lpb shows a tilted surface that extends from thecircumference of the light emitting surface Lpb toward the lightentering side.

More specifically, the light emitting surface Lpb of the immersed planeparallel plate Lp according to the first modification is substantiallysymmetric with respect to the X-axis and Y-axis directions. From anotherpoint of view, the light emitting surface Lpb of the immersed planeparallel plate Lp is two-fold rotationally symmetric with respect to theoptical axis AX. Further, the central axis Lpba (not shown in FIG. 10)of the light emitting surface Lpb and the central axis 50 a (not shownin FIG. 10) of the circle 50 corresponding to the circumference of thelight entering surface Lpa coincide with the optical axis AX. Thecentral axis (barycenter axis) of an effective exposure region ER (aneffective projection region of the projection optical system PL) formedon the wafer W is decentered in the Y-axis direction from the centralaxis Lpba (the optical axis AX). In other words, the length of the lightemitting surface Lpb in one axial direction (Y-axis) differs from thelength of the light emitting surface Lpb in the other axial direction(X-axis).

In the same manner as the embodiment shown in FIG. 9, in the firstmodification shown in FIG. 10, the portion of the image space in theprojection optical system PL filled with liquid (immersion liquid) Lm1can be reduced. This is because the light emitting surface Lpb of theimmersed plane parallel plate Lp is formed to be asymmetric relative tothe optical axis AX in accordance with the shape of the effectiveexposure region ER (or the effective projection region of the projectionoptical system PL) that excludes the optical axis AX (i.e., formed sothat the light emitting surface Lpb has different lengths in two axialdirections (XY-axes directions) that are perpendicular to each other) onthe wafer W.

FIG. 11 is a schematic diagram showing the structure of an immersedplane parallel plate according to a second modification of the presentembodiment. FIG. 11( a) is a bottom view of the immersed plane parallelplate Lp, and FIGS. 11( b) and 11(c) are side views of the immersedplane parallel plate Lp. As shown in FIG. 11, a light entering surfaceLpa of the immersed plane parallel plate Lp according to the secondmodification has a circumference corresponding to a circle 60 of whichcenter coincides with an optical axis AX (AX3). An effective lightemitting region 61 of a light emitting surface Lpb of the immersed planeparallel plate Lp is substantially symmetric with respect to X-axis andY-axis and has a rectangular shape with round corners. The effectivelight emitting region 61 has a center 61 a of decentered in the Y-axisdirection from the optical axis AX. In other words, the length of thelight emitting surface Lpb in one axial direction (Y-axis) differs fromthe length of the light emitting surface Lpb in another axial direction(X-axis).

The light emitting surface Lpb of the immersed plane parallel plate Lpis substantially symmetric with respect to the Y-axis direction andasymmetric with respect to the X-axis and contains the effective lightemitting region 61 with a small marginal region formed around theeffective light emitting region 61. A center (barycenter axis) Lpba ofthe light emitting surface Lpb (not shown in FIG. 11) is in the vicinity(vicinity in the Y-axis direction) of the center 61 a of the effectivelight emitting region 61. In FIG. 11( a), a hatched portion Lpcsurrounding the light emitting surface Lpb shows a tilted surface thatextends from the circumference of the light emitting surface Lpb towardthe light entering side.

More specifically, the light emitting surface Lpb of the immersed planeparallel plate Lp according to the second modification is substantiallysymmetric with respect to the Y-axis direction and asymmetric withrespect to X-axis. In other words, the length of the light emittingsurface Lpb in one axial direction (Y-axis direction) differs from thelength of the light emitting surface Lpb in the other axial direction(X-axis direction). Further, the circle 60, which corresponds to thecircumference of the light entering surface Lpa, has a central axis 60 a(not shown in FIG. 11) that coincides with the optical axis AX coincidewith each other, and the central axis (barycenter axis) Lpba of thelight emitting surface Lpb is decentered in the Y-axis direction fromthe optical axis AX. The central axis (barycenter axis) of an effectiveexposure region ER (an effective projection region of the projectionoptical system PL) formed on the wafer W substantially coincides withthe central axis (barycenter axis) Lpba of the light emitting surfaceLpb. From another point of view, the light emitting surface Lpb of theimmersed plane parallel plate Lp of the second modification is one-foldrotationally symmetric with respect to the optical axis AX.

In the same manner as the embodiment shown in FIG. 9, in the secondmodification shown in FIG. 11, the portion of the image space in theprojection optical system PL filled with liquid (immersion liquid) Lm1can be reduced. This is because the light emitting surface Lpb of theimmersed plane parallel plate Lp is formed to be asymmetric relative tothe optical axis AX in accordance with the shape of the effectiveexposure region ER (or the effective projection region of the projectionoptical system PL) that excludes the optical axis AX (i.e., formed sothat the light emitting surface Lpb has different lengths in two axialdirections (XY-axes directions) that are perpendicular to each other) onthe wafer W.

FIG. 12 is a schematic diagram showing the structure of an immersedplane parallel plate according to a third modification of the presentembodiment. FIG. 12( a) is a bottom view of the immersed plane parallelplate Lp, and FIGS. 12( b) and 12(c) are side views of the immersedplane parallel plate Lp. As shown in FIG. 12, a light entering surfaceLpa of the immersed plane parallel plate Lp according to the thirdmodification has a circumference corresponding to a circle 70 of whichcenter coincides with an optical axis AX (AX3). In other words, thelight entering surface Lpa of the immersed plane parallel plate Lp hassubstantially equal lengths in the two axial directions (XY-axesdirections) that are perpendicular to each other. An effective lightemitting region 71 of a light emitting surface Lpb of the immersed planeparallel plate Lp is substantially symmetric with respect to X-axis andY-axis directions and has a rectangular shape with round corners. Theeffective light emitting region 71 has a center 71 a decentered in theY-axis direction from the optical axis AX.

The light emitting surface Lpb of the immersed plane parallel plate Lpis substantially symmetric with respect to the X-axis and Y-axisdirections and contains the effective light emitting region 71 with asmall marginal region formed around the effective light emitting region71. The light emitting surface Lpb has a center Lpba that coincides withthe center 71 a of the effective light emitting region 71. In FIG. 12(a), a hatched portion Lpc surrounding the light emitting surface Lpbshows a tilted surface that extends from the circumference of the lightemitting surface Lpb toward the light entering side.

More specifically, the light emitting surface Lpb of the immersed planeparallel plate Lp according to the third modification is substantiallysymmetric with respect to the X-axis and Y-axis directions. In otherwords, the length of the light emitting surface Lpb in one axialdirection (Y-axis) differs from the length of the light emitting surfaceLpb in the other axial direction (X-axis). Further, the central axis 70a (not shown in FIG. 12) of the circle 70 corresponding to thecircumference of the light entering surface Lpa coincides with theoptical axis AX, and the central axis Lpba of the light emitting surfaceLpb is decentered in the Y-axis direction from the optical axis AX. Thecentral axis (barycenter axis) of an effective exposure region ER (aneffective projection region of the projection optical system PL) on thewafer W substantially coincides with the central axis Lpba of the lightemitting surface Lpb. From another point of view, the light emittingsurface Lpb of the immersed plane parallel plate Lp of the thirdmodification is one-fold rotationally symmetric with respect to theoptical axis AX.

In the same manner as the embodiment shown in FIG. 9, in the thirdmodification shown in FIG. 12, the portion of the image space in theprojection optical system PL filled with liquid (immersion liquid) Lm1can be reduced. This is because the light emitting surface Lpb of theimmersed plane parallel plate Lp is formed to be asymmetric relative tothe optical axis AX in accordance with the shape of the effectiveexposure region ER (or the effective projection region of the projectionoptical system PL) that excludes the optical axis AX (i.e., formed sothat the light emitting surface Lpb has different lengths in two axialdirections (XY-axes directions) that are perpendicular to each other) onthe wafer W. The structures of the first to third modifications are onlyexamples, and the structures of the light entering surface and the lightemitting surface of the immersed plane parallel plate Lp may be modifiedin various manners within the scope of the present invention.

In the above embodiment, the plane parallel plate (optical member thattypically has substantially no refractive power) Lp is arranged in theoptical path formed between the interface lens Lb and the wafer W. Thus,even when pure water, which is used as the immersion liquid, iscontaminated with gases generated from photoresist coated on the waferW, the plane parallel plate Lp arranged between the interface lens Lpand the wafer W effectively prevents the image-side optical surface ofthe interface lens Lb from being contaminated with such contaminatedpure water. Further, the refractive index of the liquid (pure water Lm1and Lm2) and the refractive index of the plane parallel plate Lp onlyslightly differ from each other. This significantly reduces requirementson the posture and the positional accuracy of the plane parallel plateLp. The contaminated plane parallel plate Lp can easily be replaced whennecessary. Thus, the optical performance of the projection opticalsystem PL can easily be restored.

Further, the immersed plane parallel plate Lp functions to reducepressure fluctuations during scanning and exposure performed with theliquid Lm2 that comes in contact with the interface lens Lp or reducepressure fluctuations during a step movement. In this case, liquid isaccommodated in a relatively small space. However, the above embodimentis not limited to the described structure. For example, the planeparallel plate Lp may be eliminated. In this case, the present inventionmay be applied to the interface lens Lb, which is the refractive opticalelement arranged nearest to the imaging position (to the wafer W). Morespecifically, the structure of the first modification shown in FIG. 10,the structure of the second modification shown in FIG. 11, or thestructure of the third modification shown in FIG. 12 may be applied tothe light entering surface and the light emitting surface of theinterface lens Lb. In such cases, the interface lens Lb has the sameadvantages as described in the above embodiment of the presentinvention. The structure of the embodiment shown in FIG. 9, in which thecenter of the circle corresponding to the circumference of the lightentering surface is decentered from the optical axis AX, is notapplicable to the light entering surface of the interface lens Lb.

In the above embodiment, the present invention is applied to an off-axiscatadioptric optical system of which the effective field of viewexcludes the optical axis. However, the application of the presentinvention is not limited in such a manner. The present invention isapplicable to other typical immersion projection optical systems. Asdescribed above, the application of the present invention to thecatadioptric and off-axis optical system ensures the flatness of animage and increases the variety of patterns of images that can beformed. In the catadioptric and off-axis optical system according toeach example that forms an image through an imaging operation performedthree times, the effective exposure region ER is formed nearer to theoptical axis AX. This reduces the rotational asymmetry of the refractiveoptical element (the plane parallel plate Lp or the interface lens Lb)arranged nearest to the imaging position (to the wafer W). Thisprojection optical system is easy to manufacture, and the structure ofthe apparatus using this projection optical system can be simplified.

In the above embodiment, the pure water (Lm1 and Lm2) is used as theliquid filled in the optical path between the interface lens Lb and thewafer W. A liquid having a refractive index higher than the pure water(e.g., a liquid having a refractive index of 1.6 or more) may be usedinstead. Examples of such high-refractive index liquids include glycenol(concentrated glycerin/fructose) (CH₂[OH]CH[OH]CH₂[OH]) and heptane(C₇H₁₆). Other examples include water containing H⁺, Cs⁻, K⁺, Cl⁻, SO₄²⁻, or PO₄ ²⁻, water containing particles of oxide of aluminum,isopropanol, hexane, heptane, decane, Delphi (cyclic hydrocarboncompound) manufactured by Mitusi Chemicals, Inc., HIF-001 manufacturedby JSR Corporation, and IF131, IF132, and IF175 manufactured by E. I. duPont de Nemours and Company.

When such a high-refractive index liquid is used, it is preferable thatsome of the lenses in the projection optical system PL, in particular,lenses near the image surface (to the wafer W), be formed from amaterial having a high refractive index. In this case, the size of theprojection optical system PL or particularly the diameter dimension ofthe projection optical system PL is reduced. It is preferable that acrystalline material, such as calcium oxide, magnesium oxide, bariumfluoride, strontium oxide, barium oxide, barium fluoride, barium lithiumfluoride (BaLiF₃), lutetium aluminum garnet (LuAG), or crystallinemagnesium aluminum spinel (MgAl₂O₄), or mixed crystal mainly composed ofsuch a crystalline material be used as the high-refractive indexmaterial.

This realizes a high numerical aperture with a feasible size. When, forexample, an ArF excimer laser (having a wavelength of 193 nm) is used,the projection optical system PL achieves a high numerical aperture ofabout 1.5 or more. When an F₂ laser having a wavelength of 157 nm isused as the exposure beam IL, it is preferable to use a liquid enablingtransmission of an F₂ laser beam, specifically, a fluorinated fluid,such as perfluoropolyalkyether (PFPE), or fluorinated oil as the liquidthat fills the image space portion.

The exposure apparatus of the above embodiment illuminates the reticle(mask) using an illumination apparatus (an illumination process) andexposes a transfer pattern in the mask onto the photosensitive substrateusing the projection optical system (an exposure process). Through theillumination and exposure processes, the exposure apparatus manufacturesmicrodevices (semiconductor devices, imaging devices, liquid crystaldisplay devices, or thin-film magnetic heads). A method formanufacturing a microdevice or specifically a semiconductor devicethrough formation of a predetermined circuit pattern on a wafer or thelike as a photosensitive substrate using the exposure apparatus of thepresent embodiment will now be described with reference to a flowchartshown in FIG. 13.

In step S301 in FIG. 13, a metal film is first formed on wafers of asingle lot through vapor deposition. In step S302, photoresist isapplied to a metal film formed on each wafer of the single lot. In stepS303, the exposure apparatus of the present invention is used tosequentially expose and transfer an image of a pattern in a mask ontoshot-regions of each wafer in the single lot with the projection opticalsystem. Then, in step S304, the photoresist formed on each wafer of thesingle lot is developed. In step S305, each wafer of the single lot isetched using the resist pattern formed on the wafer as a mask. Thisforms a circuit pattern corresponding to the mask pattern in theshot-regions of each wafer.

Afterwards, circuit patterns corresponding to upper layers are formed tocomplete the semiconductor device or the like. With the semiconductordevice manufacturing method described above, a semiconductor device withan extremely fine circuit pattern is produced with high throughput. Insteps S301 to S305, metal is deposited on the wafer through vapordeposition, resist is coated on the metal film, and then processes inwhich the resist is exposed, developed, and etched are performed. Priorto these processes, a silicon oxide film may first be formed on thewafer, and the resist may be coated on the silicon oxide film. Then, theprocesses in which the resist is exposed, developed, and etched may beperformed.

The exposure apparatus of the present embodiment may also be used toproduce a liquid crystal display device serving as a microdevice byforming a predetermined pattern (a circuit pattern or an electrodepattern) on a plate (glass substrate). One example method formanufacturing a liquid crystal display device will now be described withreference to a flowchart shown in FIG. 14. In FIG. 14, a patternformation process is performed in step S401. In step S401, a maskpattern is transferred and exposed onto a photosensitive substrate(e.g., a glass substrate coated with resist) using the exposureapparatus of the present embodiment. In other words, a photolithographyprocess is performed. Through the photolithography process, apredetermined pattern including, for example, a large number ofelectrodes is formed on the photosensitive substrate. Afterwards, apredetermined pattern is formed on the substrate through processesincluding a developing process, an etching process, and a resistremoving process. Then, a color filter formation process is performed instep S402.

In step S402, a color filter is formed by, for example, arranging pluralsets of R (red), G (green), and B (blue) dots in a matrix, or arrangingplural of sets of filters formed by R, G, and B stripes in horizontalscanning line directions. After the color filter formation process isperformed in step S402, a cell assembly process is performed in stepS403. In step S403, the substrate having a predetermined patternobtained through the pattern formation process performed in step S401and the color filter or the like obtained through the color filterformation process performed in step S402 are assembled together to formthe liquid crystal panel (liquid crystal cell).

In S403, for example, a liquid crystal is injected between the substratehaving the predetermined pattern obtained through the pattern formationprocess performed in S401 and the color filter obtained through thecolor filter formation process performed in S402 to form the liquidcrystal panel (liquid crystal cell). In a module assembly processperformed subsequently in step S404, an electric circuit for enablingthe assembled liquid crystal panel (liquid crystal cell) to perform adisplay operation and other components including a backlight aremounted. This completes the liquid crystal display device. The liquidcrystal display device manufacturing method described above enables aliquid crystal device having an extremely fine circuit pattern to beproduced with high throughput.

Although the ArF excimer laser light source is used in the aboveembodiment, other appropriate light sources, such as an F₂ laser lightsource, may be used. When an F₂ laser beam is used as the exposure beam,a fluorinated liquid enabling transmission of an F₂ laser beam, such asfluorinated oil or perfluoropolyalkyether (PFPE), is used as the liquidthat fills the image space portion.

The present invention is applied to an immersion projection opticalsystem that is mounted on the exposure apparatus in the aboveembodiment. However, the application of the present invention is notlimited to such an optical system. The present invention is applicableto other typical immersion projection optical systems. The presentinvention is also applicable to an immersion objective optical systemthat uses a refractive optical element of which optical surface comes incontact with liquid.

Although the interface lens Lp and the immersed plane parallel plate Lpare formed from silica, which is an amorphous material, in the aboveembodiment, the interface lens Lb and the immersed plane parallel plateLp do not have to be made of silica. For example, the interface lens Lband the immersed plane parallel plate Lp may be formed from acrystalline material, such as magnesium oxide, calcium oxide, strontiumoxide, or barium oxide.

Although pure water is used as the first liquid and the second liquid inthe above embodiment, the first and second liquids should not be limitedto pure water. For example, water containing H⁺, Cs⁺, K⁺, Cl⁻, SO₄ ²⁻,or PO₄ ²⁻, or isopropanol, glycerol, hexane, heptane, or decane may beused as the first and second liquids.

1. A projection optical system for projecting an image of a first planeonto a second plane through a liquid, the projection optical systemcomprising: a refractive optical element arranged nearest to the secondplane; wherein the refractive optical element includes a light emittingsurface shaped to be rotationally asymmetric with respect to an opticalaxis of the projection optical system in accordance with the shape of aneffective projection region formed on the second plane.
 2. Theprojection optical system according to claim 1, wherein the lightemitting surface of the refractive optical element is one-foldrotationally symmetric with respect to the optical axis of theprojection optical system.
 3. The projection optical system according toclaim 1, wherein the light emitting surface of the refractive opticalelement is shaped to be substantially symmetric with respect to twoaxial directions perpendicular to each other on the second plane, thelight emitting surface has a central axis that substantially coincideswith a central axis of a circle corresponding to a circumference of alight entering surface of the refractive optical element, and thecentral axis of the light emitting surface is decentered in one of thetwo axial directions from the optical axis.
 4. The projection opticalsystem according to claim 1, wherein the light emitting surface of therefractive optical element is shaped to be substantially symmetric withrespect to one of two axial directions perpendicular to each other onthe second plane and asymmetric with respect to the other one of theaxial directions, a central axis of a circle corresponding to acircumference of a light entering surface of the refractive opticalelement substantially coincide with the optical axis, and the lightemitting surface has a central axis decentered in the one of the axialdirections.
 5. The projection optical system according claim 1, whereinthe light emitting surface of the refractive optical element is shapedto be substantially symmetric with respect to two axial directionsperpendicular to each other on the second plane, a central axis of acircle corresponding to a circumference of a light entering surface ofthe refractive optical element substantially coincide with the opticalaxis, and the light emitting surface has a central axis decentered inone of the two axial directions from the optical axis.
 6. The projectionoptical system according to claim 3, wherein a central axis of theeffective projection region substantially coincides with the centralaxis of the light emitting surface.
 7. The projection optical systemaccording to claim 1, wherein the light emitting surface of therefractive optical element is two-fold rotationally symmetric withrespect to the optical axis of the projection optical system.
 8. Theprojection optical system according to claim 1, wherein the lightemitting surface of the refractive optical element is shaped to besubstantially symmetric with respect to two axial directionsperpendicular to each other on the second plane, and the light emittingsurface has a central axis that substantially coincides with the opticalaxis and a central axis of a circle corresponding to a circumference ofa light entering surface of the refractive optical element.
 9. Theprojection optical system according to claim 8, wherein the effectiveprojection region has a central axis decentered in one of the two axialdirections from the central axis of the light emitting surface.
 10. Theprojection optical system according to claim 1, wherein the refractiveoptical element is an interface lens of which first plane side comes incontact with gas and second plane side comes in contact with the liquid.11. The projection optical system according to claim 1, wherein therefractive optical element is an optical member that has substantiallyno refractive power and arranged in an optical path formed between thesecond plane and an interface lens of which first plane side comes incontact with the gas and second plane side comes in contact with theliquid.
 12. The projection optical system according to claim 1, whereina reduced image of the first plane is projected onto the second planethrough the liquid.
 13. The projection optical system according to claim1, wherein a center of an effective projection region on the secondplane is decentered from the optical axis of the projection opticalsystem.
 14. The projection optical system according to claim 1, furthercomprising: at least one concave reflective mirror and a plurality ofrefractive optical elements, wherein an effective field of view regionon the first plane and the effective projection region on the secondplane excludes the optical axis.
 15. The projection optical systemaccording to claim 14, further comprising: a refractive first imagingoptical system for forming a first intermediate image based on lightfrom the first plane; a second imaging optical system including the atleast one concave reflective mirror, for forming a second intermediateimage based on light from the first intermediate image; and a refractivethird imaging optical system for forming the image on the second planebased on light from the second intermediate image.
 16. The projectionoptical system according to claim 15, further comprising: a firstdeflection mirror arranged in an optical path between the first imagingoptical system and the second imaging optical system; and a seconddeflection mirror arranged in an optical path between the second imagingoptical system and the third imaging optical system. 17.-25. (canceled)26. A projection optical system for projecting an image of a first planeonto a second plane through a liquid, the projection optical systemcomprising: a refractive optical element arranged nearest to the secondplane, wherein when two axial directions perpendicular to each other areset on the second plane, a light emitting surface of the refractiveoptical element has a length in one of the axial directions and a lengthin the other one of the axial directions that differ from each other.27. The projection optical system according to claim 26, wherein therefractive optical element includes a light entering surface havinglengths in the two axial directions that are substantially equal to eachother.
 28. The projection optical system according to claim 26, wherein:the projection optical system is used in an exposure apparatus thatprojects a pattern while changing a positional relationship of the imageand a substrate arranged on the second plane in a scanning direction;the length of the light emitting surface in the one of the axialdirections is set to be shorter than the length of the light emittingsurface in the other one of the axial directions; and the one of theaxial directions coincides with the scanning direction.
 29. Theprojection optical system according to claim 26 wherein the lightemitting surface of the refractive optical element is shaped to besubstantially symmetric with respect to two axial directionsperpendicular to each other on the second plane, the light emittingsurface has a central axis that substantially coincides with a centralaxis of a circle corresponding to a circumference of a light enteringsurface of the refractive optical element, and the central axis of thelight emitting surface is decentered in one of the two axial directionsfrom the optical axis.
 30. The projection optical system according toclaim 26, wherein the light emitting surface of the refractive opticalelement is shaped to be substantially symmetric with respect to twoaxial directions perpendicular to each other on the second plane, andthe light emitting surface has a central axis that substantiallycoincides with the optical axis and a central axis of a circlecorresponding to a circumference of a light entering surface of therefractive optical element.
 31. The projection optical system accordingto claim 30, wherein the effective projection region has a central axisdecentered in one of the two axial directions from the central axis ofthe light emitting surface.
 32. The projection optical system accordingto claim 26, wherein the light emitting surface of the refractiveoptical element is shaped to be substantially symmetric with respect toone of two axial directions perpendicular to each other and asymmetricwith respect to the other one of the axial directions on the secondplane, a central axis of a circle corresponding to a circumference of alight entering surface of the refractive optical element substantiallycoincides with the optical axis, and the light emitting surface has acentral axis decentered in the one of the axial directions from theoptical axis.
 33. The projection optical system according to claim 26wherein the refractive optical element includes a light emitting surfaceshaped to be substantially symmetric with respect to two axialdirections perpendicular to each other, a central axis of a circlecorresponding to a circumference of the light emitting surface of therefractive optical element substantially coincides with the opticalaxis, and the light emitting surface has a central axis decentered inone of the two axial directions from the optical axis.
 34. Theprojection optical system according to claim 29, wherein the effectiveprojection region has a central axis that coincides with the centralaxis of the light emitting surface.
 35. The projection optical systemaccording to claim 26, wherein a reduced image of the first plane isprojected onto the second plane through the liquid.
 36. The projectionoptical system according to claim 26, wherein when two axial directionsperpendicular to each other are set on the second plane, a region onwhich the image is formed has a length in one of the axial directionsand a length in the other one of the axial directions that differ fromeach other.
 37. The projection optical system according to claim 1,wherein the light emitting surface of the refractive optical elementincludes a planar surface.
 38. The projection optical system accordingto claim 1, wherein the refractive optical element includes a lightentering surface having a planar surface.
 39. An exposure apparatuscomprising: the projection optical system according to claim 1 forprojecting an image of a predetermined pattern onto a photosensitivesubstrate that is set on the second plane based on illumination lightfrom the pattern set on the first plane.
 40. The exposure apparatusaccording to claim 39, wherein the pattern is projected while changing apositional relationship of the image of the pattern and thephotosensitive substrate in a scanning direction.
 41. The exposureapparatus according to claim 39, further comprising: a supply anddischarge mechanism for supplying and discharging the liquid. 42.-43.(canceled)
 44. A device manufacturing method comprising: an exposurestep of projecting and exposing an image of a pattern set on the firstplane onto a photosensitive substrate set on the second plane with theprojection optical system according to claim 1; and a development stepof developing the photosensitive substrate that has undergone theexposure step.
 45. The device manufacturing method according to claim44, wherein in the exposure step include projecting the pattern whilechanging a positional relationship of the image of the pattern and thephotosensitive substrate in a scanning direction.
 46. A refractiveoptical element for use in an immersion objective optical system thatforms an image of a first plane onto an effective projection region on asecond plane, wherein one optical surface comes in contact with aliquid, the refractive optical element wherein: the one optical surfaceof the refractive optical element is shaped to be rotationallyasymmetric with respect to an optical axis of the immersion objectiveoptical system in accordance with a shape of the effective projectionregion on the second plane.
 47. The refractive optical element accordingto claim 46, wherein the one optical surface of the refractive opticalelement is shaped to be one-fold rotationally symmetric with respect tothe optical axis of the immersion objective optical system.
 48. Therefractive optical element according to claim 46, wherein the oneoptical surface of the refractive optical element is shaped to besubstantially symmetric with respect to one of two axial directionsperpendicular to each other and asymmetric with respect to the other oneof the axial directions on the second plane, a central axis of a circlecorresponding to a circumference of another optical surface of therefractive optical element substantially coincides with the opticalaxis, and the one optical surface has a central axis that is decenteredin the one of the axial directions from the optical axis.
 49. Therefractive optical element according to claim 46, wherein the oneoptical surface of the refractive optical element is shaped to besubstantially symmetric with respect to two axial directionsperpendicular to each other on the second plane, a central axis of acircle corresponding to a circumference of another optical surface ofthe refractive optical element substantially coincides with the opticalaxis, and the one optical surface has a central axis decentered in oneof the two axial directions from the optical axis.
 50. The refractiveoptical element according to claim 47, wherein the effective projectionregion has a central axis that substantially coincides with a centralaxis of the one optical surface.
 51. The refractive optical elementaccording to claim 46, wherein the one optical surface of the refractiveoptical element is shaped to be two-fold rotationally symmetric withrespect to the optical axis of the immersion objective optical system.52. The refractive optical element according to claim 46, wherein theone optical surface of the refractive optical element is shaped to besubstantially symmetric with respect to two axial directionsperpendicular to each other on the second plane, and the one opticalsurface has a central axis that substantially coincides with a centralaxis of a circle corresponding to a circumference of another opticalsurface of the refractive optical element.
 53. The refractive opticalelement according to claim 52, wherein the effective projection regionhas a central axis decentered in one of the two axial directions fromthe central axis of the one optical surface.
 54. A refractive opticalelement for use in an immersion objective optical system that forms animage of a first plane on a second plane, wherein one optical surfacecomes in contact with a liquid, wherein: when two axial directionsperpendicular to each other are set on the second plane, the one opticalsurface of the refractive optical element has a length in one of theaxial directions and a length in the other one of the axial directionsthat differ from each other.
 55. The refractive optical elementaccording to claim 54, wherein another optical surface of the refractiveoptical element has substantially equal lengths in the first axialdirection and the second axial direction.
 56. The refractive opticalelement according to claim 54, wherein the refractive optical element isan optical member that has substantially no refractive power and isarranged in an optical path between the second plane and an interfacelens of which first plane side comes in contact with gas and secondplane side comes in contact with the liquid.
 57. The refractive opticalelement according to claim 54, comprising: another optical surfacehaving a flat plane.
 58. The refractive optical element according toclaim 54, wherein the refractive optical element is an interface lens ofwhich first plane side comes in contact with gas and second plane sidecomes in contact with the liquid.
 59. The refractive optical elementaccording to claim 54, wherein the one optical surface of the refractiveoptical element has a planar surface.
 60. The refractive optical elementaccording to claim 54, wherein when two axial directions perpendicularto each other are set on the second plane, an effective projectionregion on the second plane has a length in one of the axial directionsand a length in the other one of the axial directions that differ fromeach other. 61.-100. (canceled)
 101. An immersion objective opticalsystem for forming an image of a first plane on a second plane, theimmersion objective optical system comprising: a reflective surfaceforming a two-way optical path; a two-way optical element arranged inthe two-way optical path; a one-way optical element arranged in aone-way optical path that differs from the two-way optical path; and anaspherical surface formed on an optical surface of the two-way opticalelement; wherein an aspherical surface is not formed on every opticalsurface of the two-way optical element.
 102. The immersion objectiveoptical system according to claim 101, wherein the reflective surface isa concave reflective surface.
 103. The immersion objective opticalsystem according to claim 101, wherein the two-way optical element isformed by an amorphous material.
 104. An exposure apparatus comprising:the immersion objective optical system according to claim 101 forprojecting an image of a predetermined pattern onto a photosensitivesubstrate that is set on the second plane based on illumination lightfrom the pattern set on the first plane.
 105. The exposure apparatusaccording to claim 104, wherein the pattern is projected while changinga positional relationship of the image of the pattern and thephotosensitive substrate in a scanning direction.
 106. The exposureapparatus according to claim 104, further comprising: a supply anddischarge mechanism for supplying and discharging the liquid. 107.-108.(canceled)
 109. A device manufacturing method comprising: an exposurestep of projecting and exposing an image of a pattern set on the firstplane onto a photosensitive substrate set on the second plane with theimmersion objective optical system according to claim 101; and adevelopment step of developing the photosensitive substrate that hasundergone the exposure step.
 110. The device manufacturing methodaccording to claim 109, wherein the exposure step includes projectingthe pattern while changing a positional relationship of the image of thepattern and the photosensitive substrate in a scanning direction.111.-118. (canceled)
 119. An exposure optical system for use in anexposure apparatus for forming a pattern on an immersion region definedon part of a substrate by exposing the substrate, the exposure opticalsystem comprising: an optical member including one optical surface thatis contactable with the liquid; wherein when two axial directionsperpendicular to each other are set on the substrate, the one opticalsurface of the optical member has a length in one of the axialdirections and a length in the other one of the axial directions thatdiffer from each other.
 120. The exposure optical system according toclaim 119, wherein the one optical surface of the optical member haslengths in the two axial directions that are substantially equal to eachother.
 121. The exposure optical system according to claim 119, whereinthe optical member has substantially no refractive power and is arrangedin an optical path between the substrate and an interface lens withwhich another optical surface side comes in contact with gas and the oneoptical surface side comes in contact with the liquid.
 122. The exposureoptical system according to claim 119, being characterized bycomprising: the optical member including another optical surface havinga flat plane.
 123. The exposure optical system according to claim 119,wherein the optical member is an interface lens with which anotheroptical surface side comes in contact with gas and the one opticalsurface side comes in contact with the liquid.
 124. The exposure opticalsystem according to claim 123, wherein the one optical surface of theoptical member has a planar surface.
 125. The exposure optical systemaccording to claim 119, wherein when two axial directions perpendicularto each other are set on the substrate, a pattern formation region inwhich a pattern is formed on the substrate has a length in one of theaxial directions and a length in the other one of the axial directionsthat differ from each other.
 126. The exposure optical system accordingto claim 119, wherein the substrate is exposed while changing apositional relationship of the pattern and the substrate in a scanningdirection. 127.-128. (canceled)
 129. A device manufacturing methodcomprising: an exposure step of forming a pattern set on a substratethrough a liquid that forms an immersion region on part of the substratewith the exposure optical system according to claim 119; and adevelopment step of developing the photosensitive substrate.
 130. Thedevice manufacturing method according to claim 129, wherein the exposurestep includes exposing the substrate while changing a positionalrelationship of the pattern and the substrate in a scanning direction.131. An exposure apparatus for exposing substrate based on exposurelight through a liquid that forms an immersion region on part of thesubstrate, the exposure apparatus comprising: a supply and dischargemechanism for supplying and discharging the liquid; and an opticalmember for transmitting the exposure light; wherein the optical memberincludes a means for narrowing the immersion region.
 132. The exposureapparatus according to claim 131, wherein the substrate is exposed whilechanging a positional relationship of the exposure light and thesubstrate in a scanning direction.
 133. The exposure apparatus accordingto claim 132, wherein the means narrows the immersion region in thescanning direction.
 134. The exposure apparatus according to claim 131,wherein: the means is provided on a light emitting surface of theoptical member, wherein the light emitting surface is contactable withthe liquid.
 135. A device manufacturing method comprising: projectingand exposing a pattern on the substrate using the exposure apparatusaccording to claim
 131. 136. The projection optical system according toclaim 32, wherein the effective projection region has a central axisthat coincides with the central axis of the light emitting surface. 137.The projection optical system according to claim 33, wherein theeffective projection region has a central axis that coincides with thecentral axis of the light emitting surface.
 138. The refractive opticalelement according to claim 46, wherein the refractive optical element isan interface lens of which first plane side comes in contact with gasand second plane side comes in contact with the liquid.
 139. Therefractive optical element according to claim 46, wherein the refractiveoptical element is an optical member that has substantially norefractive power and is arranged in an optical path between the secondplane and an interface lens of which first plane side comes in contactwith gas and second plane side comes in contact with the liquid. 140.The refractive optical element according to claim 46, wherein when twoaxial directions perpendicular to each other are set on the secondplane, an effective projection region on the second plane has a lengthin one of the axial directions and a length in the other one of theaxial directions that differ from each other.